About: http://webisa.webdatacommons.org/394350445

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Inthe portion C shown in FIG. 3, the measuring patterns 13 and 14 are overlapped and such pattern as shown in FIG. 4 is formed on the wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com