About: http://webisa.webdatacommons.org/394395824

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In formation of a microcrystalline semiconductor film, oxygen inhibits crystallization and may possibly act as a donor if it is taken in by a silicon film; therefore, oxygen is an impurity that should especially be reduced.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com