About: http://webisa.webdatacommons.org/394415242

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In performing the invention to produce a multilayer cap and integrated circuit substrate of the invention, the substrate is a dielectric material in which one or more, typically many, interconnect features have been formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com