About: http://webisa.webdatacommons.org/394596187

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Hence, multiphoton lithography is a technique for creating small features in a photosensitive material, without the use of complex optical systems or photomasks.
http://www.w3.org/ns/prov#wasQuotedFrom	wikipedia.org