About: http://webisa.webdatacommons.org/39474791

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	each of the phase compensating film regions has a step cross section with 2n -step thicknesses corresponding to the depths of the each proton exchanging region, where n is an integer of 2 or more.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au