About: http://webisa.webdatacommons.org/395029113

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate used according to the present invention may, therefore, be comprised of a ceramic material, such as polycrystalline alumina, polished polycrystalline alumina, quartz or sapphire.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de