About: http://webisa.webdatacommons.org/395033068

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The processing of the web substrate in this case includes film-forming treatment by way of sputtering, vacuum evaporation or CVD other than plasma CVD, etching, thermal annealing and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com