About: http://webisa.webdatacommons.org/395059818

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The reference frame is a frame indicated as ???0 of FIG. 12, referring to the position of a fringe of the lower pattern at the time when the stepper correction value for magnification is zero.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com