About: http://webisa.webdatacommons.org/395067148

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This sensor is a capacitive sensor, where the reference cavity is typically between 1 and 3 microns in depth.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com