About: http://webisa.webdatacommons.org/395115770

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The via has a sidewall oxide 131 and is filled with a conductive material such as metal or doped polysilicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com