About: http://webisa.webdatacommons.org/395268384

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The barrier layer 932 can be deposited onto the substrate 210 using a vapor deposition process, such as CVD or PVD. The barrier layer 932 can be composed of W, Ta, or other suitable materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com