About: http://webisa.webdatacommons.org/395354017

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The node dielectric may be formed by any suitable process, including but not limited to, chemical vapor deposition (CVD), thermal oxidation, thermal nitridation, atomic layer deposition (ALD).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au