About: http://webisa.webdatacommons.org/395354624

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The included field solvers provide comprehensive coverage of MEMS-specific multi-physics, such as electrostatics, coupled electro-mechanics, piezoelectric, piezoresistive, and damping effects.
http://www.w3.org/ns/prov#wasQuotedFrom	coventor.com