About: http://webisa.webdatacommons.org/395395804

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The hard mask layer 240 is patterned with a suitable process such as photolithography processing and etching.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com