About: http://webisa.webdatacommons.org/395409342

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The film forming conditions that may be selected for the vacuum film formation chambers 71 to 73 include vacuum film formation methods such as sputtering, deposition and a combination thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com