About: http://webisa.webdatacommons.org/395479417

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The surface of a thin film such as a resist formed on the wafer and having micro openings is hydrophobic since it is covered with a methyl group (--CH ), an ethyl group (--C2 H5) and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com