About: http://webisa.webdatacommons.org/395488495

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, there is a problem in that a final CD of the etch target becomes larger than the desired CD. Also, there is a limitation in decreasing a CD of a reticle applied in the peripheral region.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com