About: http://webisa.webdatacommons.org/395565519

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 24, wherein the insulating layer is a thin film including oxide material, and NH3, SiH4, Si2H6, and a combination thereof are activated through a remote plasma process. 28.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk