About: http://webisa.webdatacommons.org/395604246

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 8, wherein supplying the metal halogen gas includes supplying the metal halogen gas to form a metal layer including a Ti layer, a TiN layer, a TiAlN layer or a TiSiN layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com