About: http://webisa.webdatacommons.org/39563259

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIG. 1A, an inner substrate 10 is shown which may comprise, for example, single crystalline silicon or other suitable semiconductor material such as gallium arsenide or the equivalent.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com