About: http://webisa.webdatacommons.org/395726836

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Photolithography is a technique used to form precise patterns and structures on the substrate surface and then the patterned substrate surface is etched to form the desired device or features.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com