About: http://webisa.webdatacommons.org/395838145

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The contacts and interconnects are usually metal formed in an integrated process such as a damascene process.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com