About: http://webisa.webdatacommons.org/3959460

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A method of fabricating and assembling silicon structures, especially silicon fixtures, particularly a silicon tower, used to support multiple silicon wafers in parallel spaced apart relationships during thermal processing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com