About: http://webisa.webdatacommons.org/396077390

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	There is no particular limitation regarding the method for forming the layers or the like, and vacuum deposition such as IBD (ion beam deposition), sputtering, MBE, and ionplating can be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com