About: http://webisa.webdatacommons.org/396157143

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If the substrate is a semiconductor wafer or liquid crystal display device having a flat portion in the edge portion, the annular gas passage and electrode will have a configuration corresponding to the flat portion of the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com