About: http://webisa.webdatacommons.org/396213659

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If the absolute value exceeds 8.0, then the resist composition becomes unsuitable for use in an immersion lithography process, and problems arise such as the resist pattern developing a T-top shape, or collapse of the resist pattern.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com