About: http://webisa.webdatacommons.org/396296162

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If the fill structures include a conductive material such as a metal (e.g., titanium or tungsten), the fill structures may serve as contacts between the source and drain regions and interconnect lines formed upon the fill structures.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com