| http://www.w3.org/ns/prov#value | - The stitching plugs are formed from the frontside trenches dug in the upper surface of the substrate by using plasma etching, wet etching, laser drilling or any combination thereof, and then depositing the insulating films, such as silicon dioxide, silicon nitride, other insulating films or any combination thereof, by alternative techniques onto the sidewalls of the embedded trenches.
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