About: http://webisa.webdatacommons.org/396760149

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The processing chambers 170 may perform a variety of processes with the substrate including deposition of films by chemical vapor deposition or physical vapor (sputtering) deposition, etching, cleaning or other processes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au