About: http://webisa.webdatacommons.org/396804846

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first step is a step of forming the lower electrode of the metal or the semiconductor on the substrate, which is carried out in the same manner as the method described in the first step of the first production method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com