About: http://webisa.webdatacommons.org/396943830

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The preferred deposition enhancing sublayers include conductive metals such as Al and Cu, barrier surfaces such as TiN, and doped silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca