| http://www.w3.org/ns/prov#value | - es of electromagnetic radiation, including ultraviolet radiation (e.g. with a wavelength of 365, 248, 193, 157 or 126 nm) and EUV (extreme ultra-violet radiation, e.g. having a wavelength in the range 5-20 nm). [0013] U.S. Pat. No. 5,340,700 (incorporated herein by reference) describes a method of printing sub-resolution features defined by image decomposition.
|
