About: http://webisa.webdatacommons.org/397150128

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The gate insulator 54 has a thickness preferably from about 0.1 micron to about 0.3 microns and is formed, for example, from a material such as silicon oxide (SiOx), silicon nitride (Six Ny), or silioxynitride (SiOx Ny .)
http://www.w3.org/ns/prov#wasQuotedFrom	google.com