About: http://webisa.webdatacommons.org/397308093

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The thick silicon oxide film causes adverse effects such as increase in cost, reduction in a rate of acceptable products due to introducti
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com