About: http://webisa.webdatacommons.org/397349444

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first insulating layer 107 is formed of a material such as silicon oxide, silicon nitride, silicon oxynitride, silicon nitride oxide, SiOF, SiOC, DLC, porous silica, or the like by a CVD method or a sputtering method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca