About: http://webisa.webdatacommons.org/397395174

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The inspection system exhibits a relatively high resolution, i.e. 0.1 ??m, and is capable of inspection for electrical defects (disconnection and conduction failures of wiring patterns, conduction failures of vias, etc.).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com