About: http://webisa.webdatacommons.org/397495858

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first insulating film is a silicon nitride film having a film thickness of 1 nm or less and an oxygen content of less than 0.1 atom %.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com