About: http://webisa.webdatacommons.org/397496581

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The interconnection layers may alternatively be made of a metal having a high melting point such as tungsten, titanium or molybdenum, a silicide thereof such as WSi2, TiSi2 or MoSi2, or a polycrystalline silicon material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr