About: http://webisa.webdatacommons.org/397565860

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The heavily doped glass layer 621 is deposited by any suitable means, such as by CVD. The heavily doped glass layer 621 is then selectively etched to leave specific portions of the trenches 604 a???b, as shown in FIG. 6D.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr