| http://www.w3.org/ns/prov#value | - Plug 42 x and second metal layer 46 x can be deposited in two separate process steps (i.e., tungsten deposition for forming the plug 42 x followed by alloy deposition for the metal layer 46 x) or as a single process step (i.e., depositing aluminum or other alloy to fill the via 38 x and to form the metal layer 46 x at the same time).
|
