About: http://webisa.webdatacommons.org/39766991

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Merely by way of example, the method and apparatus of the present invention have been applied to monitor and control fluids, for example photoresist, dispensed in a photolithography coating system.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca