About: http://webisa.webdatacommons.org/398051574

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Consequently, the dents and steps caused by the presence of the contact hole can hardly affect the aperture region, even when no planarization treatment is effected on the intervening layers such as the interlayer insulating films.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com