| http://www.w3.org/ns/prov#value | - For oxidation, the gas ambient employed is an oxygen-containing gas such as O2, ozone and steam, while for nitridation or oxynitridation, the gas ambient is a nitrogen-containing gas such as NH3, NO and N2O. Mixtures and combinations of nitrogen-containing, oxygen-containing, and inert gases may also be employed.
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