About: http://webisa.webdatacommons.org/398105724

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	To improve such problems as far as possible, it may be considered to reduce the electrode thickness to 30 ??m or less, but it causes to limit the high frequency electric power that can be applied to the plasma generating electrode.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com