About: http://webisa.webdatacommons.org/398196926

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	To prevent oxidation or other such adverse reactions during the high temperature sintering process, the susceptor 36 is enclosed within a protective atmosphere chamber, preferably a vacuum chamber which is not shown in the Figures.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com