About: http://webisa.webdatacommons.org/398232085

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, the polishing slurry can often include larger particles which can lead to scratching of the wafer or other types of manufacturing problems.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com