About: http://webisa.webdatacommons.org/398235919

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, the actual values will vary depending upon the application including the substrate, target and chamber sizes, shapes and related positions.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com