About: http://webisa.webdatacommons.org/398260605

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, a conventional plasma ashing or other similar process may be used to remove the initial spacer layer 140 and the photoresist layer 510.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es