About: http://webisa.webdatacommons.org/398327141

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For NMOS devices, it is preferred that the interlayer includes a metal that is relatively electropositive combined with a halogen, such as fluorine.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com