PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • As shown in FIG. 3A, gate insulation films 17A and 17B, which are formed of, e.g. SiO2, are provided on both side surfaces of the channel region 23 of the Fin 14.
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